Publications by Markus Muchow


  • T. Rublack, M. Muchow, M. Schade, H. Leipner, G. Seifert
    Proof of damage-free selective removal of thin dielectric coatings on silicon wafers by irradiation with femtosecond laser pulses
    J. Appl. Phys. 112, 023521 (2012)
  • T. Rublack; S. Hartnauer; M. Mergner; M. Muchow; M. Schade; H. S. Leipner; G. Seifert
    Mechanism of selective removal of transparent layers on semiconductors using ultrashort laser pulses
    Proceedings of SPIE 8247, 82470Z (2012)


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